TFT-based random access memory cells comprising thyristors

ABSTRACT

The invention includes SOI constructions containing one or more memory cells which include a transistor and a thyristor. In one aspect, a scalable GLTRAM cell provides DRAM-like density and SRAM-like performance. The memory cell includes an access transistor and a gated-lateral thyristor integrally formed above the access transistor. The cathode region (n+) of the stacked lateral thyristor device (p+/n/p/n+) is physically and electrically connected to one of the source/drain regions of the FET to act as the storage node for the memory cell. The FET transistor can include an active region which extends into a Si/Ge material. The material comprising Si/Ge can have a relaxed crystalline lattice, and a layer having a strained crystalline lattice can be between the material having the relaxed crystalline lattice and the transistor gate. The device construction can be formed over a versatile substrate base.

TECHNICAL FIELD

[0001] This disclosure relates generally to integrated circuits, andmore particularly, to memory cells containing thyristors. Exemplarymemory cells comprise gated lateral thyristor-containing random accessmemory (GLTRAM) cells incorporated into TFT constructions. Suchconstructions can be formed over a versatile substrate base.

BACKGROUND OF THE INVENTION

[0002] SOI technology differs from traditional bulk semiconductortechnologies in that the active semiconductor material of SOItechnologies is typically much thinner than that utilized in bulktechnologies. The active semiconductor material of SOI technologies willtypically be formed as a thin film over an insulating material(typically oxide), with exemplary thicknesses of the semiconductor filmbeing less than or equal to 2000 Å. In contrast, bulk semiconductormaterial will typically have a thickness of at least about 200 microns.The thin semiconductor of SOI technology can allow higher performanceand lower power consumption to be achieved in integrated circuits thancan be achieved with similar circuits utilizing bulk materials.

[0003] An exemplary integrated circuit device that can be formedutilizing SOI technologies is a so-called thin film transistor (TFT),with the term “thin film” referring to the thin semiconductor film ofthe SOI construction. In particular aspects, the semiconductor materialof the SOI construction can be silicon, and in such aspects the TFTs canbe fabricated using recrystallized amorphous silicon or polycrystallinesilicon. The silicon can be supported by an electrically insulativematerial (such as silicon dioxide), which in turn is supported by anappropriate substrate. Exemplary substrate materials include glass, bulksilicon and metal-oxides (such as, for example, Al₂O₃). If thesemiconductor material comprises silicon, the term SOI is occasionallyutilized to refer to a silicon-on-insulator construction, rather thanthe more general concept of a semiconductor-on-insulator construction.However, it is to be understood that in the context of this disclosurethe term SOI refers to semiconductor-on-insulator constructions.Accordingly, the semiconductor material of an SOI construction referredto in the context of this disclosure can comprise other semiconductivematerials in addition to, or alternatively to, silicon; including, forexample, germanium.

[0004] A problem associated with conventional TFT constructions is thatgrain boundaries and defects can limit carrier mobilities. Accordingly,carrier mobilities are frequently nearly an order of magnitude lowerthan they would be in bulk semiconductor devices. High voltage (andtherefore high power consumption), and large areas are utilized for theTFTs, and the TFTs exhibit limited performance. TFTs thus have limitedcommercial application and currently are utilized primarily for largearea electronics.

[0005] Various efforts have been made to improve carrier mobility ofTFTs. Some improvement is obtained for devices in which silicon is thesemiconductor material by utilizing a thermal anneal for grain growthfollowing silicon ion implantation and hydrogen passivation of grainboundaries (see, for example, Yamauchi, N. et al., “Drastically ImprovedPerformance in Poly-Si TFTs with Channel Dimensions Comparable to GrainSize”, IEDM Tech. Digest, 1989, pp. 353-356). Improvements have alsobeen made in devices in which a combination of silicon and germanium isthe semiconductor material by optimizing the germanium and hydrogencontent of silicon/germanium films (see, for example, King, T. J. et al,“A Low-Temperature (<=550° C.) Silicon-Germanium MOS TFT Technology forLarge-Area Electronics”, IEDM Tech. Digest, 1991, pp. 567-570).

[0006] Investigations have shown that nucleation, direction ofsolidification, and grain growth of silicon crystals can be controlledselectively and preferentially by excimer laser annealing, as well as bylateral scanning continuous wave laser irradiation/anneal forrecrystallization (see, for example, Kuriyama, H. et al., “High MobilityPoly-Si TFT by a New Excimer Laser Annealing Method for Large AreaElectronics”, IEDM Tech. Digest, 1991, pp. 563-566; Jeon, J. H. et al.,“A New Poly-Si TFT with Selectively Doped Channel Fabricated by NovelExcimer Laser Annealing”, IEDM Tech. Digest, 2000, pp. 213-216; Kim, C.H. et al., “A New High-Performance Poly-Si TFT by Simple Excimer LaserAnnealing on Selectively Floating a Si Layer”, IEDM Tech. Digest, 2001,pp. 753-756; Hara, A. et al, “Selective Single-Crystalline-SiliconGrowth at the Pre-Defined Active Regions of TFTs on a Glass by aScanning CW Layer Irradiation”, IEDM Tech. Digest, 2000, pp. 209-212;and Hara, A. et al., “High Performance Poly-Si TFTs on a Glass by aStable Scanning CW Laser Lateral Crystallization”, IEDM Tech. Digest,2001, pp. 747-750). Such techniques have allowed relatively defect-freelarge crystals to be grown, with resulting TFTs shown to exhibit carriermobility over 300 cm²/V-second.

[0007] Another technique which has shown promise for improving carriermobility is metal-induced lateral recrystallization (MILC), which can beutilized in conjunction with an appropriate high temperature anneal(see, for example, Jagar, S. et al., “Single Grain TFT with SOI CMOSPerformance Formed by Metal-Induced-Lateral-Crystallization”, IEDM Tech.Digest, 1999, p. 293-296; and Gu, J. et al., “High Performance Sub-100nm Si TFT by Pattern-Controlled Crystallization of Thin Channel Layerand High Temperature Annealing”, DRC Conference Digest, 2002, pp.49-50). A suitable post-recrystallization anneal for improving the filmquality within silicon recrystallized by MILC is accomplished byexposing recrystallized material to a temperature of from about 850° C.to about 900° C. under an inert ambient (with a suitable ambientcomprising, for example, N₂). MILC can allow nearly single crystalsilicon grains to be formed in predefined amorphous-silicon islands fordevice channel regions. Nickel-induced-lateral-recrystallization canallow device properties to approach those of single crystal silicon.

[0008] The carrier mobility of a transistor channel region can besignificantly enhanced if the channel region is made of a semiconductormaterial having a strained crystalline lattice (such as, for example, asilicon/germanium material having a strained lattice, or a siliconmaterial having a strained lattice) formed over a semiconductor materialhaving a relaxed lattice (such as, for example, a silicon/germaniummaterial having a relaxed crystalline lattice). (See, for example, Rim,K. et al., “Strained Si NMOSFETs for High Performance CMOS Technology”,VLSI Tech. Digest, 2001, p. 59-60; Cheng, Z. et al., “SiGe-On-Insulator(SGOI) Substrate Preparation and MOSFET Fabrication for ElectronMobility Evaluation” 2001 IEEE SOI Conference Digest, October 2001, pp.13-14; Huang, L. J. et al., “Carrier Mobility Enhancement in StrainedSi-on-Insulator Fabricated by Wafer Bonding”, VLSI Tech. Digest, 2001,pp. 57-58; and Mizuno, T. et al., “High Performance CMOS Operation ofStrained-SOI MOSFETs Using Thin Film SiGe-on-Insulator Substrate”, VLSITech. Digest, 2002, p. 106-107.)

[0009] The terms “relaxed crystalline lattice” and “strained crystallinelattice” are utilized to refer to crystalline lattices which are withina defined lattice configuration for the semiconductor material, orperturbed from the defined lattice configuration, respectively. Inapplications in which the relaxed lattice material comprisessilicon/germanium having a germanium concentration of from 10% to 60%,mobility enhancements of 110% for electrons and 60-80% for holes can beaccomplished by utilizing a strained lattice material in combinationwith the relaxed lattice material (see for example, Rim, K. et al.,“Characteristics and Device Design of Sub-100 nm Strained SiN andPMOSFETs”, VLSI Tech. Digest, 2002, 00. 98-99; and Huang, L. J. et al.,“Carrier Mobility Enhancement in Strained Si-on-Insulator Fabricated byWafer Bonding”, VLSI Tech. Digest, 2001, pp. 57-58).

[0010] Performance enhancements of standard field effect transistordevices are becoming limited with progressive lithographic scaling inconventional applications. Accordingly, strained-lattice-channeled-fieldeffect transistors on relaxed silicon/germanium offers an opportunity toenhance device performance beyond that achieved through conventionallithographic scaling. IBM recently announced the world's fastestcommunications chip following the approach of utilizing a strainedcrystalline lattice over a relaxed crystalline lattice (see, forexample, “IBM Builds World's Fastest Communications Microchip”, ReutersU.S. Company News, Feb. 25, 2002; and Markoff, J., “IBM Circuits are NowFaster and Reduce Use of Power”, The New York Times, Feb. 25, 2002).

[0011] Although various techniques have been developed for substantiallycontrolling nucleation and grain growth processes of semiconductormaterials, grain orientation control is lacking. Further, thepost-anneal treatment utilized in conjunction with MILC can beunsuitable in applications in which a low thermal budget is desired.Among the advantages of the invention described below is that such canallow substantial control of crystal grain orientation within asemiconductor material, while lowering thermal budget requirementsrelative to conventional methods. Additionally, the quality of the growncrystal formed from a semiconductor material can be improved relative tothat of conventional methods.

[0012] Integrated circuit memory includes dynamic random access memory(DRAM) and static random access memory (SRAM). DRAM cells provide goodmemory density, but are relatively slow. SRAM cells are faster than DRAMcells, but the area utilized for SRAM cells is large. The large areaassociated with six-transistor and four-transistor memory cells haslimited the design of high-density SRAM devices.

[0013] Negative differential resistance (NDR) devices have been used toreduce the number of elements per memory cell. However, NDR devices tendto suffer from problems such as high standby power consumption, highoperating voltages, low speeds and complicated fabrication processes. F.Nemati and J. D. Plummer have disclosed a two-device thyristor-basedSRAM cell (TRAM) that includes an access transistor and a gate-assisted,vertical thyristor. The disclosed vertical p+/n/p/n+ thyristor isoperated in a gate-enhanced switching mode to provide the memory cellwith SRAM-like performance and DRAM-like density. The performance of theTRAM cell depends on the turn-off characteristics of the verticalthyristor, and the turn-off characteristics depend on the stored chargeand carrier transit time in the p-region of the p+/n/p/n+ thyristor. Theturn-off characteristics for the vertical thyristor are improved frommilliseconds to five nanoseconds by reverse biasing the thyristor for awrite-zero operation and by using a gate to assist with turn-offswitching of the thyristor by discharging the stored charge. Even so,the geometry and vertical height of the vertical thyristor's p-regionlimits the turn-off characteristics and the associated cell performanceof the gate-assisted, vertical thyristor disclosed by Nemati andPlummer. The scalability of the TRAM cell and the ability to control theperformance of the TRAM cell are also limited.

[0014] It would be desirable to provide improved memory cells thatprovide DRAM-like density, faster SRAM-like performance, andscalability.

SUMMARY OF THE INVENTION

[0015] The present invention pertains to SOI constructions comprising atleast one memory cell encompassing a transistor and a thyristor. In oneaspect, the present invention encompasses a one-device equivalent, gatedlateral thyristor-based random access memory (GLTRAM) cell incorporatedinto a TFT construction. An exemplary memory cell construction includesa crystalline layer comprising silicon and germanium over anelectrically insulative material. An access transistor device has anactive region extending into the crystalline layer. The entirety of theactive region within the crystalline layer is within only a singlecrystal of the crystalline layer. The transistor device includes a gate,source region and drain region. A thyristor is electrically connectedwith the source region. The thyristor can be integrated with, andstacked on top of, the access transistor to enhance the density of thememory cell. The geometry of the thyristor can be accurately controlledto provide a lower stored charge volume. Further, the thyristor can betailored to reduce carrier transit time, which can provide fasterperformance and improve the gate-assisted turn-off characteristics ofthe thyristor.

[0016] In various aspects, the lateral thyristor can be fabricated usingan MILC technique adopted for TFT technology. Accordingly, the GLTRAMcell can be readily scalable with lithography to provide directscalability with technology generations. In particular embodiments, thestacked lateral thyristor is integrated by raising the source region ofthe access transistor using a selective epitaxy process. The stackedconfiguration of the GLTRAM cell can have a footprint less than 8F², andthus can have a higher density than the TRAM cell. Additionally, theGLTRAM cell can have a low standby power consumption during celloperation.

[0017] In one aspect, the invention encompasses a memory device whichincludes a transistor and a thyristor electrically connected with asource/drain region of the transistor. The transistor has a gatesupported by a crystalline layer. The crystalline layer is less than orequal to 2000 Angstroms thick, and comprises a Si/Ge material. Thetransistor has an active region, and at least a portion of the activeregion is within the Si/Ge material. The active region within the Si/Gematerial is contained within a single crystal of the material.

BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Preferred embodiments of the invention are described below withreference to the following accompanying drawings.

[0019]FIG. 1 illustrates a circuit schematic of an exemplary GLTRAM cellaccording to an aspect of the present invention.

[0020]FIG. 2 is a diagrammatic, cross-sectional view of a fragment of asemiconductor construction shown at a preliminary stage of an exemplaryprocess of the present invention

[0021]FIG. 3 is a view of the FIG. 2 wafer shown at a processing stagesubsequent to that of FIG. 2.

[0022]FIG. 4 is a view of the FIG. 2 fragment shown at a processingstage subsequent to that of FIG. 3.

[0023]FIG. 5 is a view of the FIG. 2 fragment shown at a processingstage subsequent to that of FIG. 4.

[0024]FIG. 6 is a view of the FIG. 2 fragment shown at a processingstage subsequent to that of FIG. 5.

[0025]FIG. 7 is a view of the FIG. 2 fragment shown at a processingstage subsequent to that of FIG. 6.

[0026]FIG. 8 is an expanded region of the FIG. 7 fragment shown at aprocessing stage subsequent to that of FIG. 7 in accordance with anexemplary embodiment of the present invention.

[0027]FIG. 9 is a view of the FIG. 8 fragment shown at a processingstage subsequent to that of FIG. 8.

[0028]FIG. 10 is a view of an expanded region of FIG. 7 shown at aprocessing stage subsequent to that of FIG. 7 in accordance with analternative embodiment relative to that of FIG. 8.

[0029]FIG. 11 is a diagrammatic, fragmentary, cross-sectional view of aGLTRAM cell according to an exemplary aspect of the present invention.

[0030] FIGS. 12-16 illustrate an exemplary process for forming theGLTRAM cell of FIG. 11.

[0031]FIG. 17 is a diagrammatic, fragmentary top view of adjacent GLTRAMcells in a memory array according to an exemplary aspect of the presentinvention.

[0032]FIG. 18 illustrates read-write operations for GLTRAM cellsaccording to an exemplary aspect of the present invention.

[0033]FIG. 19 is a diagrammatic view of a computer illustrating anexemplary application of the present invention.

[0034]FIG. 20 is a block diagram showing particular features of themotherboard of the FIG. 19 computer.

[0035]FIG. 21 is a simplified block diagram of a high-level organizationillustrating various aspects of an exemplary electronic system of thepresent invention.

[0036]FIG. 22 is a simplified block diagram of a high-level organizationillustrating additional aspects of the exemplary electronic system ofthe present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0037] The present invention pertains to memory devices comprisingtransistors and thyristors. In particular aspects, the present inventionpertains to a one-device equivalent gated lateral thyristor-based SRAM(GLTRAM) cell. The GLTRAM cell includes an access transistor and anintegrated, gate-assisted lateral thyristor. The geometry of the lateralthyristor can be accurately controlled to provide a lower stored chargedvolume. Additional, the geometry of the gate-assisted lateral thyristoris capable of being tailored to reduce carrier transit time, which canprovide faster performance and improve gate-assisted turn-offcharacteristics of the thyristor.

[0038]FIG. 1 illustrates a circuit schematic of an exemplary GLTRAM cell2. Cell 2 includes an access transistor 4 and a thyristor 6. Accesstransistor 4 can be, for example, an NFET transistor. Thyristor 6 isillustrated as a p+/n/p/n+ thyristor (specifically, it is illustrated astwo diodes in the shown schematic diagram). One definition of athyristor is a semiconductor device for high power switching. Thyristorshave also been referred to as semiconductor-controlled rectifiers (SCR).One of ordinary skill in the art can appreciate upon reading andcomprehending this disclosure that the present subject matter is notlimited to a particular type of semiconductor doping.

[0039] A first wordline (WL1) is connected to a gate 3 of accesstransistor 4. A bitline (BL) is connected to a first source/draindiffusion region 5 (hereinafter referred to as a drain region tosimplify the disclosure) of the access transistor 4. A secondsource/drain region 7 (hereinafter referred to as a source region tosimplify the disclosure) of the access transistor 4 is connected to afirst end 9 of the thyristor 6. A second end 11 of the thyristor isconnected to a voltage (V_(REF)). The reference voltage is typicallyaround 0.8 to 1.0 volts, and programming pulses on the bitlines and thewordlines are typically about 2.0 volts. For a p+/n/p/n+ thyristor, thefirst end 9 comprises the n+ region of the thyristor and is referred toas a cathode; and the second end 11 comprises the p+ region of thethyristor and is referred to as an anode.

[0040] A thyristor gate 15 is connected to a second wordline (WL2). Thegate 15 assists with switching the thyristor 6, and specifically gatesthe p/n+ diode part of the thyristor 6 with the fringe field extendinginto the n region of the thyristor. For the p+/n/p/n+ thyristor, thethyristor gate 15 provides a field to the thyristor around the p region.Such field can significantly increase the turn-off speed of thethyristor and allows a low-voltage turn-on of the thyristor.Additionally, standby leakage power can be reduced.

[0041] The second diffusion (source) region 7 functions as a storagenode for the memory cell 2. A charge stored at the source region 7 isread by turning on the access transistor 4 (providing a first wordlinepulse) and sensing the bitline. A write-one operation is performed byproviding a first wordline pulse to turn on the access transistor 4 andprovide a current path between the thyristor 6 and the bitline (BL),which is held at a low potential, and providing a second wordline pulseto assist with a low-voltage turn on of the thyristor 6. In this state,the thyristor is “on” and the reference potential is transferred fromthe anode to the cathode of the thyristor to store “one”. A write-zerooperation is performed by providing a bitline pulse of sufficientpotential to reverse bias the thyristor 6, providing a first wordlinepulse to turn on the access transistor, providing a current path betweenthe bitline (BL) and the thyristor 6, and providing a second wordlinepulse to increase the turn-off speed of the thyristor 6. The thyristor 6is reverse biased to a sufficient voltage for a sufficient time periodto allow the charge carriers to recombine.

[0042] According to various embodiments, thyristor 6 is a lateralp+/n/p/n+ thyristor integrated on top of the access transistor 3.Accordingly, source 7 can be a raised source which functions as acathode node for the thyristor 6 (such will be described in more detailwith reference to FIG. 11 below).

[0043] This disclosure pertains not only to GLTRAM cells, but also toSOI constructions incorporating GLTRAM cells. In exemplary aspects, theSOI constructions utilize non-conventional substrates. General aspectsof the SOI constructions will next be described with reference FIGS.2-10, and this disclosure will then return to discussion specific toGLTRAM devices.

[0044] Referring to FIG. 2, a fragment of a semiconductor construction10 is illustrated at a preliminary processing stage. To aid ininterpretation of the claims that follow, the terms “semiconductivesubstrate” and “semiconductor substrate” are defined to mean anyconstruction comprising semiconductive material, including, but notlimited to, bulk semiconductive materials such as a semiconductive wafer(either alone or in assemblies comprising other materials thereon), andsemiconductive material layers (either alone or in assemblies comprisingother materials). The term “substrate” refers to any supportingstructure, including, but not limited to, the semiconductive substratesdescribed above.

[0045] Construction 10 comprises a base (or substrate) 12 and aninsulator layer 14 over the base. Base 12 can comprise, for example, oneor more of glass, aluminum oxide, silicon dioxide, metal and plastic.Additionally, and/or alternatively, base 12 can comprise a semiconductormaterial, such as, for example, a silicon wafer.

[0046] Layer 14 comprises an electrically insulative material, and inparticular applications can comprise, consist essentially of, or consistof silicon dioxide. In the shown construction, insulator layer 14 is inphysical contact with base 12. It is to be understood, however, thatthere can be intervening materials and layers provided between base 12and layer 14 in other aspects of the invention (not shown). For example,a chemically passive thermally stable material, such as silicon nitride(Si₃N₄), can be incorporated between base 12 and layer 14. Layer 14 canhave a thickness of, for example, from about 200 nanometers to about 500nanometers, and can be referred to as a buffer layer.

[0047] Layer 14 preferably has a planarized upper surface. Theplanarized upper surface can be formed by, for example,chemical-mechanical polishing.

[0048] A layer 16 of semiconductive material is provided over insulatorlayer 14. In the shown embodiment, semiconductive material layer 16 isformed in physical contact with insulator 14. Layer 16 can have athickness of, for example, from about 5 nanometers to about 10nanometers. Layer 16 can, for example, comprise, consist essentially of,or consist of either doped or undoped silicon. If layer 16 comprises,consists essentially of, or consists of doped silicon, the dopantconcentration can be from about 10¹⁴ atoms/cm³ to about 10²⁰ atoms/cm³.The dopant can be either n-type or p-type, or a combination of n-typeand p-type.

[0049] The silicon utilized in layer 16 can be either polycrystallinesilicon or amorphous silicon at the processing stage of FIG. 2. It canbe advantageous to utilize amorphous silicon in that it is typicallyeasier to deposit a uniform layer of amorphous silicon than to deposit auniform layer of polycrystalline silicon.

[0050] Referring to FIG. 3, material 16 is patterned into a plurality ofdiscrete islands (or blocks) 18. Such can be accomplished utilizing, forexample, photoresist (not shown) and photolithographic processing,together with an appropriate etch of material 16.

[0051] A capping layer 20 is provided over islands 18 and over portionsof layer 14 exposed between the islands. Layer 20 can, for example,comprise, consist essentially of, or consist of one or both of silicondioxide and silicon. Layer 20 can also comprise multiple layers ofsilicon dioxide, stress-free silicon oxynitride, and silicon.

[0052] After formation of capping layer 20, small voids (nanovoids) andsmall crystals are formed in the islands 18. The formation of the voidsand crystals can be accomplished by ion implanting helium 22 intomaterial 16 and subsequently exposing material 16 to laser-emittedelectromagnetic radiation. The helium can aid in formation of thenanovoids; and the nanovoids can in turn aid in crystallization andstress relief within the material 16 during exposure to theelectromagnetic radiation. The helium can thus allow crystallization tooccur at lower thermal budgets than can be achieved without the heliumimplantation. The helium is preferably implanted selectively intoislands 18 and not into regions between the islands. The exposure ofconstruction 10 to electromagnetic radiation can comprise subjecting theconstruction to scanned continuous wave laser irradiation while theconstruction is held at an appropriate elevated temperature (typicallyfrom about 300° C. to about 450° C.). The exposure to theelectromagnetic radiation can complete formation of single crystal seedswithin islands 18. The laser irradiation is scanned along an axis 24 inthe exemplary shown embodiment.

[0053] The capping layer 20 discussed previously is optional, but canbeneficially assist in retaining helium within islands 18 and/orpreventing undesirable impurity contamination during the treatment withthe laser irradiation.

[0054] Referring to FIG. 4, islands 18 are illustrated after voids havebeen formed therein. Additionally, small crystals (not shown) have alsobeen formed within islands 18 as discussed above.

[0055] Capping layer 20 (FIG. 3) is removed, and subsequently a layer 26of semiconductive material is formed over islands 18. Layer 26 cancomprise, consist essentially of, or consist of silicon and germanium;or alternatively can comprise, consist essentially of, or consist ofdoped silicon/germanium. The germanium concentration within layer 26 canbe, for example, from about 10 atomic percent to about 60 atomicpercent. In the shown embodiment, layer 26 physically contacts islands18, and also physically contacts insulator layer 14 in gaps between theislands. Layer 26 can be formed to a thickness of, for example, fromabout 50 nanometers to about 100 nanometers, and can be formed utilizinga suitable deposition method, such as, for example, plasma-assistedchemical vapor deposition.

[0056] A capping layer 28 is formed over semiconductor layer 26. Cappinglayer 28 can comprise, for example, silicon dioxide. Alternatively,capping layer 28 can comprise, for example, a combination of silicondioxide and stress-free silicon oxynitride. Capping layer 28 can protecta surface of layer 26 from particles and contaminants that couldotherwise fall on layer 26. If the processing of construction 10 occursin an environment in which particle formation and/or incorporation ofcontaminants is unlikely (for example, an ultrahigh vacuum environment),layer 28 can be eliminated from the process. Layer 28 is utilized in thepatterning of a metal (discussed below). If layer 28 is eliminated fromthe process, other methods besides those discussed specifically hereincan be utilized for patterning the metal.

[0057] Referring to FIG. 5, openings 30 are extended through cappinglayer 28 and to an upper surface of semiconductive material 26. Openings30 can be formed by, for example, photolithographic processing topattern a layer of photoresist (not shown) into a mask, followed by asuitable etch of layer 28 and subsequent removal of the photoresistmask.

[0058] A layer 32 of metal-containing material is provided withinopenings 30, and in physical contact with an upper surface ofsemiconductive material 26. Layer 32 can have a thickness of, forexample, less than or equal to about 10 nanometers. The material oflayer 32 can comprise, consist essentially of, or consist of, forexample, nickel. Layer 32 can be formed by, for example, physical vapordeposition. Layer 32 can be formed to be within openings 30 and not overmaterial 28 (as is illustrated in FIG. 5) by utilizing depositionconditions which selectively form metal-containing layer 32 on a surfaceof material 26 relative to a surface of material 28. Alternatively,material 32 can be deposited by a substantially non-selective process toform the material 32 over the surface of material 28 as well as over thesurface of material 26 within openings 30, and subsequently material 32can be selectively removed from over surfaces of material 28 whileremaining within openings 30. Such selective removal can be accomplishedby, for example, chemical-mechanical polishing, and/or by forming aphotoresist mask (not shown) over the material 32 within openings 30,while leaving other portions of material 32 exposed, and subsequentlyremoving such other portions to leave only the segments of material 32within openings 30. The photoresist mask can then be removed.

[0059] Oxygen 34 is ion implanted through layers 26 and 28, and intolayer 16 to oxidize the material of layer 16. For instance, if layer 16consists of silicon, the oxygen can convert the silicon to silicondioxide. Such swells the material of layer 16, and accordingly fills thenanovoids that had been formed earlier. The oxygen preferably onlypartially oxidizes layer 16, with the oxidation being sufficient to fillall, or at least substantially all, of the nanovoids; but leaving atleast some of the seed crystals within layer 16 that had been formedwith the laser irradiation discussed previously. In some aspects, theoxidation can convert a lower portion of material 16 to silicon dioxidewhile leaving an upper portion of material 16 as non-oxidized silicon.

[0060] The oxygen ion utilized as implant 34 can comprise, for example,oxygen (O₂) or ozone (O₃). The oxygen ion implant can occur before orafter formation of openings 30 and provision of metal-containing layer32.

[0061] Construction 10 is exposed to continuous wave laser irradiationwhile being held at an appropriate temperature (which can be, forexample, from about 300° C. to about 450° C.; or in particularapplications can be greater than or equal to 550° C.) to causetransformation of at least some of layer 26 to a crystalline form. Theexposure to the laser irradiation comprises exposing the material ofconstruction 10 to laser-emitted electromagnetic radiation scanned alonga shown axis 36. Preferably, the axis 36 along which the laserirradiation is scanned is the same axis that was utilized for scanningof laser irradiation in the processing stage of FIG. 3.

[0062] The crystallization of material 26 (which can also be referred toas a recrystallization of the material) is induced utilizingmetal-containing layer 32, and accordingly corresponds to an applicationof MILC. The MILC transforms material 26 to a crystalline form and theseed layer provides the crystallographic orientation while undergoingpartial oxidation.

[0063] The crystal orientation within crystallized layer 26 canoriginate from the crystals initially formed in islands 18. Accordingly,crystal orientations formed within layer 26 can be controlled throughcontrol of the crystal orientations formed within the semiconductivematerial 16 of islands 18.

[0064] The oxidation of part of material 16 which was describedpreviously can occur simultaneously with the MILC arising fromcontinuous wave laser irradiation. Partial oxidation of seed layer 16facilitates: (1) Ge enrichment into Si—Ge layer 26 (which improvescarrier mobility); (2) stress-relief of Si—Ge layer 26; and (3)enhancement of recrystallization of Si—Ge layer 26. The crystallizationof material 26 can be followed by an anneal of material 26 at atemperature of, for example, about 900° C. for a time of about 30minutes, or by an appropriate rapid thermal anneal, to further ensurerelaxed, defect-free crystallization of material 26.

[0065]FIG. 6 shows construction 10 after the processing described abovewith reference to FIG. 5. Specifically, the voids that had been inmaterial 16 are absent due to the oxidation of material 16. Also,semiconductive material 26 has been transformed into a crystallinematerial (illustrated diagrammatically by the cross-hatching of material26 in FIG. 6). Crystalline material 26 can consist of a single largecrystal, and accordingly can be monocrystalline. Alternatively,crystalline material 26 can be polycrystalline. If crystalline material26 is polycrystalline, the crystals of the material will preferably beequal in size or larger than the blocks 18. In particular aspects, eachcrystal of the polycrystalline material can be about as large as one ofthe shown islands 18. Accordingly, the islands can be associated in aone-to-one correspondence with crystals of the polycrystalline material.

[0066] The shown metal layers 32 are effectively in a one-to-onerelationship with islands 18, and such one-to-one correspondence ofcrystals to islands can occur during the MILC. Specifically, singlecrystals can be generated relative to each of islands 18 during the MILCprocess described with reference to FIG. 5. It is also noted, however,that although the metal layers 32 are shown in a one-to-one relationshipwith the islands in the cross-sectional views of FIGS. 5 and 6, theconstruction 10 comprising the shown fragment should be understood toextend three dimensionally. Accordingly, the islands 18 and metal layers32 can extend in directions corresponding to locations into and out ofthe page relative to the shown cross-sectional view. There can beregions of the construction which are not shown where a metal layeroverlaps with additional islands besides the shown islands.

[0067] Referring to FIG. 7, layers 28 and 32 (FIG. 6) are removed, andsubsequently a layer 40 of crystalline semiconductive material is formedover layer 26. In typical applications, layer 26 will have a relaxedcrystalline lattice and layer 40 will have a strained crystallinelattice. As discussed previously, layer 26 will typically comprise bothsilicon and germanium, with the germanium being present to aconcentration of from about 10 atomic percent to about 60 atomicpercent. Layer 40 can comprise, consist essentially of, or consist ofeither doped or undoped silicon; or alternatively can comprise, consistessentially of, or consist of either doped or undoped silicon/germanium.If layer 40 comprises silicon/germanium, the germanium content can befrom about 10 atomic percent to about 60 atomic percent.

[0068] Strained lattice layer 40 can be formed by utilizing methodssimilar to those described in, for example, Huang, L. J. et al.,“Carrier Mobility Enhancement in Strained Si-on-Insulator Fabricated byWafer Bonding”, VLSI Tech. Digest, 2001, pp. 57-58; and Cheng, Z. etal., “SiGe-On-Insulator (SGOI) Substrate Preparation and MOSFETFabrication for Electron Mobility Evaluation” 2001 IEEE SOI ConferenceDigest, October 2001, pp. 13-14.

[0069] Strained lattice layer 40 can be large polycrystalline ormonocrystalline. If strained lattice layer 40 is polycrystalline, thecrystals of layer 40 can be large and in a one-to-one relationship withthe large crystals of a polycrystalline relaxed crystalline layer 26.Strained lattice layer 40 is preferably monocrystalline over theindividual blocks 18.

[0070] The strained crystalline lattice of layer 40 can improve mobilityof carriers relative to the material 26 having a relaxed crystallinelattice. However, it is to be understood that layer 40 is optional invarious aspects of the invention.

[0071] Each of islands 18,can be considered to be associated with aseparate active region 42, 44 and 46. The active regions can beseparated from one another by insulative material subsequently formedthrough layers 26 and 40 (not shown). For instance, a trenched isolationregion can be formed through layers 26 and 40 by initially forming atrench extending through layers 26 and 40 to insulative material 14, andsubsequently filling the trench with an appropriate insulative materialsuch as, for example, silicon dioxide.

[0072] As discussed previously, crystalline material 26 can be a singlecrystal extending across an entirety of the construction 10 comprisingthe shown fragment, and accordingly extending across all of the shownactive regions. Alternatively, crystalline material 26 can bepolycrystalline. If crystalline material 26 is polycrystalline, thesingle crystals of the polycrystalline material will preferably be largeenough so that only one single crystal extends across a given activeregion. In other words, active region 42 will preferably comprise asingle crystal of material 26, active region 44 will comprise a singlecrystal of the material, and active region 46 will comprise a singlecrystal of the material, with the single crystals being separate anddiscrete relative to one another.

[0073]FIG. 8 shows an expanded view of active region 44 at a processingstage subsequent to that of FIG. 7, and specifically shows a transistordevice 50 associated with active region 44 and supported by crystallinematerial 26.

[0074] Transistor device 50 comprises a dielectric material 52 formedover strained lattice 40, and a gate 54 formed over dielectric material52. Dielectric material 52 typically comprises silicon dioxide, and gate54 typically comprises a stack including an appropriate conductivematerial, such as, for example, conductively-doped silicon and/or metal.

[0075] A channel region 56 is beneath gate 54, and in the shownconstruction extends across strained crystalline lattice material 40.The channel region may also extend into relaxed crystalline latticematerial 26 (as shown). Channel region 56 is doped with a p-type-dopant.

[0076] Transistor construction 50 additionally comprises source/drainregions 58 which are separated from one another by channel region 56,and which are doped with n-type dopant to an n⁺ concentration(typically, a concentration of at least 10²¹ atoms/cm³). In the shownconstruction, source/drain regions 58 extend across strained latticelayer 40 and into relaxed lattice material 26. Although source/drainregions 58 are shown extending only partially through relaxed latticelayer 26, it is to be understood that the invention encompasses otherembodiments (not shown) in which the source/drain regions extend all theway through relaxed material 26 and to material 16.

[0077] Channel region 56 and source/drain regions 58 can be formed byimplanting the appropriate dopants into crystalline materials 26 and 40.The dopants can be activated by rapid thermal activation (RTA), whichcan aid in keeping the thermal budget low for fabrication of fieldeffect transistor 50.

[0078] An active region of transistor device 50 extends acrosssource/drain regions 58 and channel region 56. Preferably the portion ofthe active region within crystalline material 26 is associated with onlyone single crystal of material 26. Such can be accomplished by havingmaterial 26 be entirely monocrystalline. Alternatively, material 26 canbe polycrystalline and comprise an individual single grain whichaccommodates the entire portion of the active region that is withinmaterial 26. The portion of strained lattice material 40 that isencompassed by the active region is preferably a single crystal, andcan, in particular aspects, be considered an extension of the singlecrystal of the relaxed lattice material 26 of the active region.

[0079] Crystalline materials 40 and 26:can, together with anycrystalline structures remaining in material 16, have a total thicknessof less than or equal to about 2000 Å. Accordingly the crystallinematerial can correspond to a thin film formed over an insulativematerial. The insulative material can be considered to be insulativelayer 14 alone, or a combination of insulative layer 14 and oxidizedportions of material 16.

[0080] The transistor structure 50 of FIG. 8 corresponds to an n-typefield effect transistor (NFET), and in such construction it can beadvantageous to have strained crystalline material 40 consist of astrained silicon material having appropriate dopants therein. Thestrained silicon material can improve mobility of electrons throughchannel region 56, which can improve performance of the NFET devicerelative to a device lacking the strained silicon lattice. Although itcan be preferred that strained lattice material 40 comprise silicon inan NFET device, it is to be understood that the strained lattice canalso comprise other semiconductive materials. A strained silicon latticecan be formed by various methods. For instance, strained silicon couldbe developed by various means and lattice 40 could be created by latticemismatch with other materials or by geometric conformal latticestraining on another substrate (mechanical stress).

[0081] As mentioned above, strained lattice 40 can comprise othermaterials alternatively to, or additionally to, silicon. The strainedlattice can, for example, comprise a combination of silicon andgermanium. There can be advantages to utilizing the strained crystallinelattice comprising silicon and germanium relative to structures lackingany strained lattice. However, it is generally most preferable if thestrained lattice consists of silicon alone (or doped silicon), ratherthan a combination of silicon and germanium for an NFET device.

[0082] A pair of sidewall spacers 60 are shown formed along sidewalls ofgate 54, and an insulative mass 62 is shown extending over gate 54 andmaterial 40. Conductive interconnects 63 and 64 extend through theinsulative mass 62 to electrically connect with source/drain regions 58.Interconnects 63 and 64 can be utilized for electrically connectingtransistor construction 50 with other circuitry external to transistorconstruction 50. Such other circuitry can include, for example, abitline and a capacitor in applications in which construction 50 isincorporated into dynamic random access memory (DRAM).

[0083]FIG. 9 shows construction 10 at a processing stage subsequent tothat of FIG. 8, and shows a capacitor structure 100 formed over and inelectrical contact with conductive interconnect 64. The shown capacitorstructure extends across gate 54 and interconnect 63.

[0084] Capacitor construction 100 comprises a first capacitor electrode102, a second capacitor electrode 104, and a dielectric material 106between capacitor electrodes 102 and 104. Capacitor electrodes 102 and104 can comprise any appropriate conductive material, including, forexample, conductively-doped silicon. In particular aspects, electrodes102 and 104 will each comprise n-type doped silicon, such as, forexample, polycrystalline silicon doped to a concentration of at leastabout 10²¹ atoms/cm³ with n-type dopant. In a particular aspect of theinvention, electrode 102, conductive interconnect 64 and thesource/drain region 58 electrically connected with interconnect 64comprise, or consist of, n-type doped semiconductive material.Accordingly, n-type doped semiconductive material extends from thesource/drain region, through the interconnect, and through the capacitorelectrode.

[0085] Dielectric material 106 can comprise any suitable material, orcombination of materials. Exemplary materials-suitable for dielectric106 are high dielectric constant materials including, for example,silicon nitride, aluminum oxide, TiO₂, Ta₂O₅, ZrO₂, etc.

[0086] The conductive interconnect 63 is in electrical connection with abitline 108. Top capacitor electrode 104 is shown in electricalconnection with an interconnect 110, which in turn connects with areference voltage 112, which can, in particular aspects, be ground. Theconstruction of FIG. 9 can be considered a DRAM cell, and such can beincorporated into an electronic system (such as, for example, a computersystem) as a memory device.

[0087]FIG. 10 shows construction 10 at a processing stage subsequent tothat of FIG. 7 and alternative to that described previously withreference to FIG. 8. In referring to FIG. 10, similar numbering will beused as is used above in describing FIG. 8, where appropriate.

[0088] A transistor construction 70 is shown in FIG. 10, and suchconstruction differs from the construction 50 described above withreference to FIG. 8 in that construction 70 is a p-type field effecttransistor (PFET) rather than the NFET of FIG. 8. Transistor device 70comprises an n-type doped channel region 72 and p⁺-doped source/drainregions 74. In other words, the channel region and source/drain regionsof transistor device 70 are oppositely doped relative to the channelregion and source/drain regions described above with reference to theNFET device 50 of FIG. 8.

[0089] The strained crystalline lattice material 40 of the PFET device70 can consist of appropriately doped silicon, or consist ofappropriately doped silicon/germanium. It can be most advantageous ifthe strained crystalline lattice material 40 comprises appropriatelydoped silicon/germanium in a PFET construction, in thatsilicon/germanium can be a more effective carrier of holes with highermobility than is silicon without germanium.

[0090] The transistor devices discussed above (NFET device 50 of FIG. 8,and PFET device 70 of FIG. 10) can be utilized in numerous constructionsin addition to the construction described above with reference to FIG.9. For instance, the transistor devices can be utilized in memory cellscomprising thyristors, such as, for example, GLTRAM cells.

[0091]FIG. 11 illustrates a cross-sectional view of an exemplary GLTRAMcell 200 formed in accordance with an aspect of the present invention.In referring to cell 200, the numbering utilized above in describingFIGS. 2-10 will be used, where appropriate.

[0092] Cell 200 comprises a substrate base 12 having an insulativematerial 14 formed thereover (described previously with reference toFIGS. 2-10). As discussed previously, substrate base 12 can comprise,for example, one or more of glass, aluminum oxide, silicon dioxide,metal, plastic and/or semiconductor materials (with an exemplarysemiconductor material being a p-type doped silicon wafer). Insulativelayer 14 can comprise, consist essentially of, or consist of silicondioxide and can be in physical contact with substrate 12 (as shown), orcan be separated by one or more intervening materials and layers.

[0093] Layers 16, 26, and 40 are formed over insulative material 14.Layer 16 can, as described above, comprise crystalline silicon and/orsilicon dioxide. Layer 26 can comprise, consist essentially of, orconsist of Si/Ge; or alternatively can comprise, consist essentially of,or consist of doped Si/Ge. The germanium concentration within layer 26can be, for example, from 10 atomic percent to about 60 atomic percent.Layer 26 can comprise a relaxed crystalline lattice.

[0094] Layer 40 can comprise, consist essentially of, or consist ofcrystalline semiconductive material (in particular aspects having anappropriate dopant or combination of dopants therein) having a strainedcrystalline lattice. The crystalline semiconductive material of layer 40can, for example, comprise, consist essentially of, or consist of eitherdoped or undoped silicon; or alternatively can comprise, consistessentially of, or consist of either doped or undoped Si/Ge.Source/drain regions 58 extend into layers 40 and 26, and in the shownexemplary construction the source/drain regions are n+ doped.Accordingly, the illustrated transistor device is an NFET device. It isnoted that source/drain regions 58 of FIG. 11 are similar to thesource/drain regions 58 of FIG. 8, and are conductively-doped as werethe source/drain regions of FIG. 8. However, the source/drain regions ofFIG. 11 are not shown with cross-hatching. None of the conductivematerials of FIG. 11 are shown with cross-hatching in an effort tosimplify the drawing. The discussion herein will, however, identify thematerials of FIG. 11 which are electrically conductive.

[0095] A transistor gate 54 is over crystalline material 40, andseparated from the crystalline material by a suitable dielectricmaterial 52. Dielectric material 52 can comprise, for example, silicondioxide.

[0096] Sidewall spacers 60 are along sidewalls of gate 54.

[0097] A channel region 56 is beneath gate 54 and between thesource/drain regions 58. Channel region 56 is doped with a p-typedopant. The NFET device comprising gate 54 is labeled as device 50. SuchNFET device has an active region extending into layers 26 and 40.Preferably, the portion of the active region within layer 26 will beentirely contained within a single crystalline grain of the material oflayer 26, and also the portion of the active layer within layer 40 Willbe contained within a single crystalline grain of the material of layer40.

[0098] A pair of isolation regions 202 are shown at edges of layers 16,26 and 40. Isolation regions 202 can comprise, for example, silicondioxide, and can correspond to shallow trench isolation regions.Isolation regions 202 electrically isolate an active region of NFETdevice 50 from adjacent circuitry (not shown).

[0099] The illustrated source/drain region 58 on the left of gate 54 canbe referred to as a drain region, and the source/drain region 58 on theright of gate 54 can be referred to as a source region. The drain regionis silicided (as evidenced by silicide region 204). Also, gate 54 cancomprise an upper silicon surface (such as a polysilicon surface) andsuch surface is silicided in the shown exemplary construction (asevidenced by silicide region 206). Silicide regions 204 and 206 areelectrically conductive regions. Silicide region 204 is utilized forforming electrical contact between a bitline 208 and the drain region.Silicide 206 is utilized for forming electrical contact between awordline 210 and transistor gate 54. Bitline 208 can correspond to thebitline (BL) of FIG. 1 and wordline 210 can correspond to the linelabeled WL1 in FIG. 1.

[0100] A conductive pedestal 212 extends over source region 58. Pedestal212 can be considered to be a raised source region of NFET device 50.Pedestal 212 can comprise, consist essentially of, or consist of, forexample, n+doped silicon, such as, for example, n+ doped single crystalsilicon or polycrystalline silicon (polysilicon). Raised source region212 can be formed, for example, utilizing a selective epitaxy process,thereby forming a single crystal silicon pedestal.

[0101] An insulative mass 214 extends over layer 40, wordline 210 andgate 54. Mass 214 can comprise, consist essentially of, or consist of,for example, borophosphosilicate glass (BPSG), and/or silicon dioxide.Bitline 208 and raised source region 212 extend through insulative mass214.

[0102] A laterally extending p+/n/p/n+ thyristor 220 includes raisedsource region 212 as a cathode. Thyristor 220 also includes a p+ region222, an n region 224, and a p region 226 which are over insulative mass214. Regions 222, 224 and 226 are elevationally above wordline 210 andtransistor gate 54 in the exemplary shown embodiment. P+ region 222 andn region 224 are shown having portions directly above transistor gate54.

[0103] P+ region 222 forms the anode of thyristor 220 and is silicided(as illustrated by silicide region 230). A reference voltage (V_(REF))232 is electrically connected with p+ region 222 through silicide region230. Lateral thyristor 220 can be appropriately formed to provide alower stored charged volume in the p region of the thyristor and toreduce carrier transit time for faster performance and better control ofthe turn-off characteristics of the thyristor.

[0104] A thyristor gate oxide 234 extends over a portion of thyristor220, and a polysilicon thyristor gate 236 is formed on the thyristorgate oxide 234. The polysilicon thyristor gate 236 is silicided (asillustrated by the silicide region 238). A second wordline 240 iselectrically connected to thyristor gate 236 through silicide 238.Wordline 240 can correspond to the wordline labeled as WL2 in FIG. 1.Gate-assisted switching of the thin, lateral thyristor formed in theexemplary shown embodiment can be more effective than gate-assistedswitching of vertical thyristors. Although it can be advantageous toutilize laterally-extending thyristors in various aspects of theinvention, it is to be understood that other types of thyristors,including vertically-extending thyristors, can be utilized in someaspects of the invention.

[0105] A thin film silicon layer is typically utilized to form regions222, 224 and 226 of thyristor 220. Such thin film silicon is initiallydoped with n-type impurities at a doping level of 1×10¹⁷ atoms/cm³ orlower, which remains the doping level for the p+/n background level ofthe thyristor 220. All of the regions of the gates for the first andsecond wordlines are heavily doped with n-type impurities, although thegate for the thyristor could also be p-type if such is appropriate whentaking into a consideration the work function differences associationwith such option.

[0106] Various figures, including FIG. 11, show various different dopantlevels. Such figures can utilize one or more of the designations p+, p,p−, n−, n and n+ to distinguish the levels. The difference in dopantconcentration between the regions identified as being p+, p and p− aretypically as follows. A p+ region has a dopant concentration of at leastabout 10²⁰ atoms/cm³, a p region has a dopant concentration of fromabout 10¹⁴ to about 10¹⁸ atoms/cm³, and a p− region has a dopantconcentration in the order of or less than 10¹⁶ atoms/cm³. It is notedthat regions identified as being n−, n and n+ will have dopantconcentrations similar to those described above relative to the p−, pand p+ regions respectively, except, of course, the n regions will havean opposite-type conductivity enhancing dopant therein than do the pregions.

[0107] The p+, p, and p− dopant levels are shown in the drawing only toillustrate differences in dopant concentration. It is noted that theterm “p” is utilized herein to refer to both a dopant type and arelative dopant concentration. To aid in interpretation of thisspecification and the claims that follow, the term “p” is to beunderstood as referring only to dopant type, and not to a relativedopant concentration, except when it is explicitly stated that the term“p” refers to a relative dopant concentration. Accordingly, for purposesof interpreting this disclosure and the claims that follow, it is to beunderstood that the term “p-type doped” refers to a dopant type of aregion and not a relative dopant level. Thus, a p-type doped region canbe doped to any of the p+, p, and p− dopant levels discussed above.Similarly, an n-type doped region can be doped to any of the n+, n, andn− dopant levels discussed above.

[0108] FIGS. 12-16 illustrate an exemplary process for forming theGLTRAM cell of FIG. 11. The process steps for fabrication of the GLTRAMdevice 200 can be compatible with standard processing technology.

[0109] Referring to FIG. 12, n+ diffusion regions 58 for the accesstransistor are formed in p-type doped layers 26 and 40 using standardfabrication steps, such as, for example, a dopant implant. The accesstransistor is isolated using shallow trench isolation (STI) processingtechniques, as represented by the illustrated formation of isolationregions 202. It is noted that source/drain regions 58 can be formedbefore formation of an access transistor gate (as shown), or inalternative processing can be formed after formation of the accesstransistor gate utilizing a self-aligned implant relative to the accesstransistor gate.

[0110]FIG. 13 shows gate oxide 52, transistor gate 54, and sidewallspacers 60 formed over layer 40. Additionally, silicide regions 204 and206 have been formed, as has first wordline 210, with wordline 210 beingan extension of the gate 54/206. A block source mask can be used toprevent silicidation of the n+source region during the silicidation ofthe n+ drain region and the transistor gate.

[0111] An insulative material layer 214, such as, for example, an oxidelayer is formed. An exemplary oxide layer is a low-temperature oxidelayer, which can be appropriately deposited.

[0112] Raised source region 212 (which can also be referred to as then+cathode region of the thyristor 220 (FIG. 11)) is formed to extendthrough oxide layer 214 and to drain region 58. Such can be accomplishedby opening a window through mass 214 and to the crystallinesemiconductive material of layer 40 for a selective epitaxy depositionprocess to raise the n+ source region and thereby form the shownpedestal 212. A thyristor cathode mask can be used to perform theselected epitaxy process and thereby form the raised source region 212of the access transistor.

[0113] A thin layer of n-doped amorphous silicon 250 is deposited overinsulative mass 214. The amorphous silicon can, for example, have athickness of from about 300 Angstroms to about 1000 Angstroms. Anamorphous silicon film mask can be used to accurately and controllablydeposit the amorphous silicon in the desired position and with a desiredgeometry for the thyristor.

[0114] Referring to FIG. 14, a layer of low temperature oxide 252 isformed over a portion of amorphous silicon 250. The low temperatureoxide can also be formed adjacent pedestal 212 to raise an elevationallevel of mass 214 on the illustrated right side of pedestal 212 (asshown).

[0115] A layer 254 of an appropriate metal (typically nickel) isprovided adjacent layer 252 and over a portion of amorphous silicon 250.Metal layer 254 is utilized to crystallize the silicon of layer 250through a metal-induced lateral crystallization (MILC) technique. Asdiscussed previously, MILC uses the lateral migration of metals, such asnickel, to enhance the grain size and provide improved crystallentity ofa semiconductive material. The MILC process can also smooth out apolysilicon surface. In various embodiments, layer 254 comprises,consists essentially of, or consists of nickel, and is deposited over adefined anode region of thin silicon film 250. A nickel-containing layer254 can be formed to a thickness of, for example, about 100 Angstroms. Athyristor anode mask can be utilized to deposit the nickel on theamorphous silicon as part of the MILC process. Subsequently, lateralcrystallization is carried out in, for example, a nitrogen ambient.

[0116] Referring to FIG. 15, metal-containing layer 254 is removed andthe layer 252 is utilized as a mask during implantation of p-dopant intothin film 250 (FIG. 14) to form p+ doped anode region 222 of thyristor220 (FIG. 11). A suitable p-type dopant is boron. The mask level thatdefines the removable metal strip (such as nickel, for example) for MILCcan be utilized to define the p+ anode region 222 of the thyristor. MILCtypically uses a low temperature oxide, which is an oxide deposited bychemical vapor deposition at a temperature below about 500° C. In theillustrated exemplary embodiment, the low temperature oxide 252functions as an implant mask for the p+ anode implant.

[0117] Referring to FIG. 16, oxide layer 252 (FIG. 15) is removed andthe gate oxide 234 is grown on top of remaining portions of silicon thinfilm 250 (FIG. 15). A second wordline polysilicon gate mask can beutilized to define the thyristor gate oxide, the p− region of thethyristor (i.e., the region 226 of the thyristor 220 shown in FIG. 11)and the polysilicon gate 236. Boron is implanted to form the p region ofthe thyristor. The boron concentration is about 1×10¹⁷ atoms/cm³. Theboron penetrates through the gate oxide 234 and counter-dopes the n-typesilicon thin film. The n+ region 212 remains unaffected by boronpenetration because of the significantly higher doping concentration ofthe n+ region of the cathode (with a typical concentration being fromabout 1×10²⁰ to about 2×10²⁰ atoms/cm³). The polysilicon gate 236 of thethyristor is formed on the gate oxide 234.

[0118] After the gate processing step, both the p+ region 222 and thepoly n+ gate for the second wordline (gate 236) are silicided, as shownby the formed silicide regions 230 and 238. The silicidation can beaccomplished utilizing standard processing steps. It is noted that theterm silicided or silicide is utilized throughout this specification torefer to a metal silicide, such as, for example, nickel-silicide (NiSi₂or Ni₂Si), cobalt-silicide (CoSi₂), titanium-silicide (TiSi₂),tungsten-silicide (WSi₂), and the like. The silicides can reduceparasitic series resistance. After formation of the silicide, contactand metallization steps can be conducted, together with otherconventional processing to form the completed structure 200 of FIG. 11.

[0119]FIG. 17 shows a top view of adjacent GLTRAM cells in a memoryarray according to various embodiments of the present invention. Theillustrated memory array 360 includes a first memory cell 362, a secondmemory cell 364, and a third memory cell 366. The first and secondmemory cells 362 and 364 share a bitline contact 368. In other words,the drain regions of the first and second memory cells are in contactwith the shared bitline contact. Additionally, the second and thirdmemory cells 364 and 366 share a thyristor gate, as illustrated by thesecond polysilicon gate (PG2) mask line. The thyristor gate assists withswitching the lateral thyristors in both the second memory cell 364 andthe third memory cell 366. FIG. 17 also illustrates that the secondmemory cell 364 and the third memory cell 366 share a thyristor cathodemask (TCM) used to form the raised n+ source region of the accesstransistors in both the second memory cell and the third memory cell.Cell density can be improved by sharing bitline contacts and thyristorgates. However it is to be understood that the invention alsoencompasses embodiments (not shown) in which bitline contacts and/orthyristor gates are not shared.

[0120] The cathode regions of the cell thyristors are shown in FIG. 17as n+ regions 332 and 336, and are defined by an appropriate mask priorto the selective-epitaxy process for raising the source regions of theassociated access transistors. The mask level defining the raised n+regions is labeled as a thyristor cathode mask (TCM). The secondpolysilicon wordline gate overlaps the n+ regions to define the pregions of the associated thyristors. The p regions are formed bycounter-doping the background n− region of the thin film silicon layerof the thyristor using the boron implanted polysilicon gate as thedoping source. An appropriate dose of boron is implanted into the gate,and a rapid thermal anneal (RTA) is performed to diffuse the boronthrough the gate oxide and counter-dope the region below. In thismanner, a self-aligned highly controlled p− region of the thyristor canbe defined. This controlled formation can lower the stored chargevolume, improve the turn-off characteristics of the thyristor, and allowthe memory cell to have a fast performance. The polysilicon gate for thethyristor can be subsequently doped with a heavy dose of n+ impurity(for example, phosphorous) to form the n+ gate.

[0121]FIG. 18 illustrates read-write operations for GLTRAM cells inexemplary aspects of the present invention. The illustrated read-writeoperations are for a GLTRAM cell comprising an NFET access transistorand a p+/n/p/n+ thyristor, such as is illustrated in FIGS. 1 and 11. Asone of ordinary skill in the art will understand, upon reading andcomprehending this disclosure, an exemplary cell of the presentinvention can be designed to operate using different voltages. By way ofexample, and without limitation, one of ordinary skill in the art willunderstand, upon reading and comprehending this disclosure, how toincorporate a PFET access transistor instead of an NFET accesstransistor. Since electrons are typically significantly more mobile thanholes, a memory cell incorporating an NFET access transistor istypically faster than a memory cell incorporating a PFET accesstransistor.

[0122] In various embodiments, the power supply voltage (Vdd) isapproximately 2.0 volts, the pulse potential of the first wordline (WL1)is approximately 2.0 volts, the pulse potential of the bitline (BL) isapproximately 2.0 volts, the pulse potential of the reference node(V_(REF)) is approximately 0.8 volts, and the pulse potential of thesecond wordline (WL2) is approximately 1.5 volts.

[0123] WL2 is pulsed for both write-one and write-zero operations whilethe bitline is pulsed only for write-zero. During the write-one, thesecond wordline (WL2) assists the thyristor in forward biased “on” modein which the thyristor is conducting and raising the potential of thefloating bitline. During the write-zero, the bitline (BL) pulse reversebiases the cathode node of the thyristor while the second wordline (WL2)pulse assists in switching the thyristor off completely within the shortduration of the reverse biased pulse of the bitline (BL). The cell isread by turning on the access transistor using the first wordline (WL1)and sensing the stored charge on the bitline (BL).

[0124] The cell performance can be dependent on the thyristor turn-offspeed (write-0) which can be dramatically enhanced by using a thyristorgate, and in particular, a lateral thyristor gate. Since the storedcharge volume is significantly lower in the lateral thyristor, thegate-assisted lateral thyristor is expected to be turned off within onenanosecond of the bitline pulse, thereby significantly improving theperformance of the cell.

[0125] Forward and reverse I-V characteristics of the GLTRAM cellsindicate that the second wordline voltage can allow a small forward biaspotential to turn on the thyristor. Additionally, the GLTRAM can have avery small standby current in the OFF state.

[0126]FIG. 19 illustrates generally, by way of example, but not by wayof limitation, an embodiment of a computer system 400 according to anaspect of the present invention. Computer system 400 includes a monitor401 or other communication output device, a keyboard 402 or othercommunication input device, and a motherboard 404. Motherboard 404 cancarry a microprocessor 406 or other data processing unit, and at leastone memory device 408. Memory device 408 can comprise various aspects ofthe invention described above, including, for example, the DRAM unitcell described with reference to FIG. 8 or the GLTRAM cell describedwith reference to FIG. 11. Memory device 408 can comprise an array ofmemory cells, and such array can be coupled with addressing circuitryfor accessing individual memory cells in the array. Further, the memorycell array can be coupled to a read circuit for reading data from thememory cells. The addressing and read circuitry can be utilized forconveying information between memory device 408 and processor 406. Suchis illustrated in the block diagram of the motherboard 404 shown in FIG.20. In such block diagram, the addressing circuitry is illustrated as410 and the read circuitry is illustrated as 412.

[0127] In particular aspects of the-invention, memory device 408 cancorrespond to a memory module. For example, single in-line memorymodules (SIMMS) and dual in-line memory modules (DIMMs) may be used inthe implementation which utilize the teachings of the present invention.The memory device can be incorporated into any of a variety of designswhich provide different methods of reading from and writing to memorycells of the device. One such method is the page mode operation. Pagemode operations in a DRAM are defined by the method of accessing a rowof a memory cell arrays and randomly accessing different columns of thearray. Data stored at the row and column intersection can be read andoutput while that column is accessed.

[0128] An alternate type of device is the extended data output (EDO)memory which allows data stored at a memory array address to beavailable as output after the addressed column has been closed. Thismemory can increase some communication speeds by allowing shorter accesssignals without reducing the time in which memory output data isavailable on a memory bus. Other alternative types of devices includeSDRAM, DDR SDRAM, SLDRAM, VRAM and Direct RDRAM, as well as others suchas SRAM or Flash memories.

[0129]FIG. 21 illustrates a simplified block diagram of a high-levelorganization of various embodiments of an exemplary electronic system700 of the present invention. System 700 can correspond to, for example,a computer system, a process control system, or any other system thatemploys a processor and associated memory. Electronic system 700 hasfunctional elements, including a processor or arithmetic/logic unit(ALU) 702, a control unit 704, a memory device unit 706 and aninput/output (I/O) device 708. Generally, electronic system 700 willhave a native set of instructions that specify operations to beperformed on data by the processor 702 and other interactions betweenthe processor 702, the memory device unit 706 and the I/O devices 708.The control unit 704 coordinates all operations of the processor 702,the memory device 706 and the I/O devices 708 by continuously cyclingthrough a set of operations that cause instructions to be fetched fromthe memory device 706 and executed. In various embodiments, the memorydevice 706 includes, but is not limited to, random access memory (RAM)devices, read-only memory (ROM) devices, and peripheral devices such asa floppy disk drive and a compact disk CD-ROM drive. One of ordinaryskill in the art will understand, upon reading and comprehending thisdisclosure, that any of the illustrated electrical components arecapable of being fabricated to include a GLRTAM cell in accordance withvarious aspects of the present invention.

[0130]FIG. 22 is a simplified block diagram of a high-level organizationof various embodiments of an exemplary electronic system 800. The system800 includes a memory device 802 that has an array of memory cells 804,address decoder 806, row access circuitry 808, column access circuitry810, read/write control circuitry 812 for controlling operations, andinput/output circuitry 814. The memory device 802 further includes powercircuitry 816, and sensors 820, such as current sensors for determiningwhether a memory cell is in a low-threshold conducting state or in ahigh-threshold non-conducting state. The illustrated power circuitry 816includes power supply circuitry 880, circuitry 882 for providing areference voltage, circuitry 884 for providing the first wordline withpulses, circuitry 886 for providing the second wordline with pulses, andcircuitry 888 for providing the bitline with pulses. The system 800 alsoincludes a processor 822, or memory controller for memory accessing.

[0131] The memory device 802 receives control signals 824 from theprocessor 822 over wiring or metallization lines. The memory device 802is used to store data which is accessed via I/O lines. It will beappreciated by those skilled in the art that additional circuitry andcontrol signals can be provided, and that the memory device 802 has beensimplified to help focus on the invention. At least one of the processor822 or memory device 802 can include a GLTRAM cell of the type describedpreviously in this disclosure.

[0132] The various illustrated systems of this disclosure are intendedto provide a general understanding of various applications for thecircuitry and structures of the present invention, and are not intendedto serve as a complete description of all the elements and features ofan electronic system using memory cells (such as, for example, GLTRAMcells) in accordance with aspects of the present invention. One of theordinary skill in the art will understand that the various electronicsystems can be fabricated in single-package processing units, or even ona single semiconductor chip, in order to reduce the communication timebetween the processor and the memory device(s).

[0133] Applications for SOI constructions with memory cells utilizingtransistors and thyristors (such as, for example, GLTRAM cells) caninclude electronic systems for use in memory modules, device drivers,power modules, communication modems, processor modules, andapplication-specific modules, and may include multilayer, multichipmodules. Such circuitry can further be a subcomponent of a variety ofelectronic systems, such as a clock, a television, a cell phone, apersonal computer, an automobile, an industrial control system, anaircraft, and others.

[0134] In compliance with the statute, the invention has been describedin language more or less specific as to structural and methodicalfeatures. It is to be understood, however, that the invention is notlimited to the specific features shown and described, since the meansherein disclosed comprise preferred forms of putting the invention intoeffect. The invention is, therefore, claimed in any of its forms ormodifications within the proper scope of the appended claimsappropriately interpreted in accordance with the doctrine ofequivalents.

The invention claimed is:
 1. A memory cell construction, comprising: anelectrically insulative material; a crystalline layer comprising siliconand germanium over the electrically insulative material; an accesstransistor device having an active region extending into the crystallinelayer; the entirety of the active region within the crystalline layerbeing within only a single crystal of the crystalline layer; thetransistor device including a gate and a source region; and a thyristorelectrically connected with the source region.
 2. The construction ofclaim 1 wherein the transistor gate is over the crystalline layer andwherein the source region is entirely beneath the transistor gate. 3.The construction of claim 1 wherein the source region comprises a raisedsource portion; and wherein the thyristor is a lateral thyristor abovethe transistor device and has a first end in physical contact with theraised source portion.
 4. The construction of claim 1 wherein thecrystalline layer comprises from about 10 to about 60 atomic percentgermanium.
 5. The construction of claim 1 wherein the crystalline layeris polycrystalline.
 6. The construction of claim 1 wherein thecrystalline layer is monocrystalline.
 7. The construction of claim 1wherein the crystalline layer has a relaxed crystalline lattice, andfurther comprising a strained crystalline lattice layer between thecrystalline layer and the transistor device gate.
 8. The construction ofclaim 7 herein the strained crystalline lattice includes silicon.
 9. Theconstruction of claim 7 wherein the strained crystalline latticeincludes silicon and germanium.
 10. The construction of claim 1 whereinthe transistor device is an NFET device.
 11. The construction of claim 1wherein the transistor device is a PFET device.
 12. The construction ofclaim 1 wherein the electrically insulative material is supported by asubstrate; and wherein the crystalline layer and electrically insulativematerial are together comprised by an SOI construction.
 13. Theconstruction of claim 12 wherein the substrate comprises asemiconductive material.
 14. The construction of claim 12 wherein thesubstrate comprises glass.
 15. The construction of claim 12 wherein thesubstrate comprises aluminum oxide.
 16. The construction of claim 12wherein the substrate comprises silicon dioxide.
 17. The construction ofclaim 12 wherein the substrate comprises a metal.
 18. The constructionof claim 12 wherein the substrate comprises a plastic.
 19. Asemiconductor-on-insulator construction, comprising: a substrate; aninsulator layer over the substrate; a crystalline layer comprisingsilicon and germanium over the insulator layer; a transistor devicesupported by the crystalline layer, the transistor device comprising agate and an active region proximate the gate; the active regionincluding a channel region; at least a portion of the active regionbeing within the crystalline layer; an entirety of the active regionwithin the crystalline layer being within a single crystal of thecrystalline layer; the transistor device comprising a pair ofsource/drain regions; and a thyristor electrically connected within oneof the source/drain regions of the transistor device.
 20. Theconstruction of claim 19 wherein: the transistor device is an NFETdevice and said one of the source/drain regions is an n+ source region;the thyristor is a p+/n/p/n+ thyristor; and a cathode of the thyristorphysically contacts the n+ source region.
 21. The construction of claim20 wherein the n+ source region extends vertically over the crystallinelayer; and wherein the thyristor extends horizontally.
 22. Theconstruction of claim 19 wherein the crystalline layer has a relaxedcrystalline lattice, and further comprising a strained crystallinelattice layer between the crystalline layer and the transistor devicegate.
 23. The construction of claim 22 wherein the strained crystallinelattice layer includes silicon.
 24. The construction of claim 22 whereinthe strained crystalline lattice layer includes silicon and germanium.25. The construction of claim 19 wherein the insulator layer consists ofsilicon dioxide.
 26. The construction of claim 19 wherein the entiretyof the crystalline layer is a single crystal.
 27. The construction ofclaim 19 wherein the crystalline layer is polycrystalline.
 28. Theconstruction of claim 19 wherein the crystalline layer is in physicalcontact with the insulator layer.
 29. The construction of claim 19wherein the crystalline layer consists of silicon and germanium.
 30. Theconstruction of claim 29 wherein the crystalline layer comprises fromabout 10 to about 60 atomic percent germanium.
 31. The construction ofclaim 19 wherein the substrate comprises a semiconductive material. 32.The construction of claim 19 wherein the substrate comprises glass. 33.The construction of claim 19 wherein the substrate comprises aluminumoxide.
 34. The construction of claim 19 wherein the substrate comprisessilicon dioxide.
 35. The construction of claim 19 wherein the substratecomprises a metal.
 36. The construction of claim 19 wherein thesubstrate comprises a plastic.
 37. A memory device comprising: atransistor having a gate supported by a crystalline layer and having apair of source/drain regions proximate the gate; the crystalline layerbeing less than or equal to about 2000 Å thick; the crystalline layercomprising a material which includes silicon and germanium; thetransistor having an active region; at least a portion of the activeregion being within the material; the active region within the materialbeing contained within a single crystal of the material; and a thyristorelectrically connected with one of the source/drain regions.
 38. Theconstruction of claim 37 wherein: the transistor device is an NFETdevice and said one of the source/drain regions is an n+ source region;the thyristor is a p+/n/p/n+ thyristor; and a cathode of the thyristorphysically contacts the n+ source region.
 39. The construction of claim38 wherein the n+ source region extends vertically over the crystallinelayer; and wherein the thyristor extends horizontally.
 40. The memorydevice of claim 37 wherein the crystalline layer is polycrystalline. 41.The memory device of claim 37 wherein the crystalline layer ismonocrystalline.
 42. The memory device of claim 37 wherein thecrystalline layer has a relaxed crystalline lattice, and furthercomprising a strained crystalline lattice layer between the crystallinelayer and the transistor gate.
 43. The memory device of claim 42 whereinthe strained crystalline lattice includes silicon.
 44. The memory deviceof claim 42 wherein the strained crystalline lattice includes siliconand germanium.
 45. An electronic system, the electronic systemcomprising a memory device, the memory device including: an array ofmemory cells, at least some of the memory cells including transistorsand thyristors; the transistors having gates supported by a crystallinelayer; the crystalline layer being less than or equal to about 2000 Åthick; the crystalline layer comprising a material which includessilicon and germanium; the at least some of the transistors havingactive regions within the crystalline layer; each active region withinthe crystalline layer including only one crystal of said material;addressing circuitry coupled to the array of memory cells for accessingindividual memory cells in the array of memory cells; and a read circuitcoupled to the memory cell array for reading data from memory cells inthe array of memory cells.
 46. The electronic system of claim 45wherein: the transistor devices are NFET devices comprising n+ sourceregions; the thyristors are p+/n/p/n+ thyristors; and cathodes of thethyristors physically contact the n+ source regions.
 47. The electronicsystem of claim 46 wherein the n+ source regions extend vertically overthe crystalline layer; and wherein the thyristors extend horizontally.48. The electronic system of claim 45 wherein the crystalline layer ispolycrystalline.
 49. The electronic system of claim 45 wherein thecrystalline layer is monocrystalline.
 50. The electronic system of claim45 wherein the crystalline layer has a relaxed crystalline lattice, andfurther comprising a strained crystalline lattice layer between thecrystalline layer and the transistor gates.
 51. The electronic system ofclaim 50 wherein the strained crystalline lattice includes silicon. 52.The electronic system of claim 50 wherein the strained crystallinelattice includes silicon and germanium.